A Plasma Lens for Magnetron Sputtering
Publication Type
Journal Article
Date Published
11/2011
Authors
DOI
Abstract
A plasma lens, consisting of a solenoid and potential-defining ring electrodes, has been placed between a magnetron and substrates to be coated. Photography reveals qualitative information on excitation, ionization, and the transport of plasma to the substrate.
Journal
IEEE Transactions on Plasma Science
Volume
39
Year of Publication
2011
Issue
11
ISSN
0093-3813
Organization
Building Technologies Department, Building Technology and Urban Systems Division, Windows and Envelope Materials