Observation of Ti4+ ions in a high power impulse magnetron sputtering plasma

TitleObservation of Ti4+ ions in a high power impulse magnetron sputtering plasma
Publication TypeJournal Article
Year of Publication2008
AuthorsJoakim Andersson, Arutiun P. Ehiasarian, André Anders
JournalApplied Physics Letters
Volume93
Issue7
Pagination71504
Date Published08/2008
Abstract

Multiply charged titanium ions including Ti4+ were observed in high power impulse magnetron sputtering discharges. Mass/charge spectrometry was used to identify metal ion species. Quadruply charged titanium ions were identified by isotope-induced broadening at mass/charge 12. Due to their high potential energy, Ti4+ ions give a high yield of secondary electrons, which in turn are likely to be responsible for the generation of multiply charged states.

DOI10.1063/1.2973179
LBNL Report Number

LBNL-680E