Ion Implantation of Mg and C into GaN Films Grown by Ion-Assisted MBE

TitleIon Implantation of Mg and C into GaN Films Grown by Ion-Assisted MBE
Publication TypeReport
Year of Publication1993
AuthorsJennifer T Ross, Michael D Rubin, X. Yao, Nathan Newman, Amy Moll
LBNL Report Number

LBL-34414