Drifting potential humps in ionization zones: The “propeller blades” of high power impulse magnetron sputtering

TitleDrifting potential humps in ionization zones: The “propeller blades” of high power impulse magnetron sputtering
Publication TypeJournal Article
Year of Publication2013
AuthorsAndré Anders, Matjaž Panjan, Robert Franz, Joakim Andersson, Pavel A Ni
JournalApplied Physics Letters
Volume103
Issue14
Pagination144103
Date Published2013
ISSN00036951
KeywordsElectric fields, ionization, plasma ionization, sputter deposition, sputtering
Abstract

Ion energy distribution functions measured for high power impulse magnetron sputtering show features, such as a broad peak at several 10 eV with an extended tail, as well as asymmetry with respect to E × B, where E and B are the local electric and magnetic field vectors, respectively. Here it is proposed that those features are due to the formation of a potential hump of several 10 V in each of the traveling ionization zones. Potential hump formation is associated with a negative-positive-negative space charge that naturally forms in ionization zones driven by energetic drifting electrons.

DOI10.1063/1.4823827
Short TitleAppl. Phys. Lett.